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Impact of Seed Annealing on the Reliability of Monolithic GaAs/Si p-n Diode Optical Phase Shifters
- Tsiara,Artemisia ;
- Kim, Young hyun;
- Yudistira,Didit;
- Kunert,Bernardette ;
- Baryshnikova,Marina ;
- 외 3명
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We report the reliability assessment of carrier-depletion p-n diode GaAs/Si optical modulators monolithically integrated on a 300-mm Si wafer. Dark current remains stable under long accelerating aging tests. Devices without seed annealing experience a shift of Vπ.Lπ with no stress temperature dependence.
- 제목
- Impact of Seed Annealing on the Reliability of Monolithic GaAs/Si p-n Diode Optical Phase Shifters
- 저자
- Tsiara,Artemisia ; Kim, Young hyun; Yudistira,Didit; Kunert,Bernardette ; Baryshnikova,Marina ; Pantouvaki,Marianna ; Campenhout,Joris Van ; Croes,Kristof
- 발행일
- 2022-09
- 유형
- Proceeding
- 저널명
- 2022 EUROPEAN CONFERENCE ON OPTICAL COMMUNICATION (ECOC)
- 페이지
- 1 ~ 3
- 언어
- ENG
- 출판사
- IEEE
- 발행국가
- 미국
- 분량
- 3 페이지