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High-Performance In-Ga-Sn-O Thin-Film Transistors Deposited via Thermal Atomic Layer Deposition
- 제목
- High-Performance In-Ga-Sn-O Thin-Film Transistors Deposited via Thermal Atomic Layer Deposition
- 저자
- 안지훈
- 발행일
- 2024-11-12
- 학회명
- Korean International Semiconductor Conference on Manufacturing Technology 2024