Li, N co-controlled Lithium Phosphorous Oxy-nitride(LiPON) Electrolyte Coating for Enhancing Ionic Conductivity using ALD

제목
Li, N co-controlled Lithium Phosphorous Oxy-nitride(LiPON) Electrolyte Coating for Enhancing Ionic Conductivity using ALD
저자
박태주
발행일
2021-10-05
학회명
IUMRS-ICA 2021
개최지
ICC Jeju(Hybrid)