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Area-Selective Atomic Layer Deposition of Ru Thin Films Using Aldehyde-Based Inhibitors on Nitride Surfaces
- 제목
- Area-Selective Atomic Layer Deposition of Ru Thin Films Using Aldehyde-Based Inhibitors on Nitride Surfaces
- 저자
- 김우희
- 발행일
- 2023-11-22
- 학회명
- KISM 2023