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Improved PEALD ZrO2 Film Properties Using Hollow Cathode Plasma Source

제목
Improved PEALD ZrO2 Film Properties Using Hollow Cathode Plasma Source
저자
박태주
발행일
2022-01-26
학회명
제29회 한국반도체학술대회
개최지
강원도 하이원 그랜드호텔

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