상세 보기
Effect of Yttrium Doping on Ferroelectricity of As-grown Hf1-xZrxO2 Thin Films via Atomic Layer Deposition
- 제목
- Effect of Yttrium Doping on Ferroelectricity of As-grown Hf1-xZrxO2 Thin Films via Atomic Layer Deposition
- 저자
- 안지훈
- 발행일
- 2022-11-07
- 학회명
- The 7th International Conference on Electronic Materials and Nanotechnology for Green Environment 2022