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Enhancing Topographical Selectivity in Atomic Layer Deposition of HfO2 Thin Films for High Aspect Ratio Structures using Vapor-Dosed Surface Protector
- 제목
- Enhancing Topographical Selectivity in Atomic Layer Deposition of HfO2 Thin Films for High Aspect Ratio Structures using Vapor-Dosed Surface Protector
- 저자
- 김우희
- 발행일
- 2025-11-11
- 학회명
- KISM 2025