Tribological reliability of vapor deposited 1H,1H,2H,2H- Perfluorodecyltrichlorosilane by AFM

초록

Wear reliability of 111,1 H,2H,2H-Perfluorodecyltrichlorosilane thin films which was coated by vapor SAM were investigated on high applied force by surface force microscope. Friction values were measured repeat scan up to 2,000 times at room temperature. Friction values were not change on applied force of 1,000 nN, applied pressure of 23.9 GPa. Finally, SFM can be successfully characterized wear reliability of thin films and the FDTS films shows good long term reliability on high applied pressure. © 2007 Materials Research Society.