상세 보기
Enhanced Surface Adsorption in Electric Field/Potential Assisted Atomic Layer Deposition (EA-ALD) of Ultrathin Ru Film
- 제목
- Enhanced Surface Adsorption in Electric Field/Potential Assisted Atomic Layer Deposition (EA-ALD) of Ultrathin Ru Film
- 저자
- 박태주
- 발행일
- 2021-06-28
- 학회명
- ALD/ALE 2021
- 개최지
- 온라인