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Novel deposition of amorphous aluminum oxide thin film using a direct liquid injection chemical vapor deposition (DLI-CVD) system
- 제목
- Novel deposition of amorphous aluminum oxide thin film using a direct liquid injection chemical vapor deposition (DLI-CVD) system
- 저자
- 이선영
- 발행일
- 2024-04-24
- 학회명
- 2024 MRS Spring Meeting & Exhibit
- 개최지
- Seattle, Washington, USA