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Effect of the Ga cycle on the performance of In-Ga-O Thin-Film Transistors Deposited via Thermal Atomic Layer Deposition
- 제목
- Effect of the Ga cycle on the performance of In-Ga-O Thin-Film Transistors Deposited via Thermal Atomic Layer Deposition
- 저자
- 안지훈
- 발행일
- 2026-04-26
- 학회명
- MRS Spring 2026