Self-Assembled Hierarchical Nanoporous Structures for Durable Lubricant-Infused Surfaces

Lim, Joowon; Lee, Geonho; Kim, Beomsu; Lee, Sueng Yoon; Lim, Dohyun; Oh, Junho; Lee, Won Chul

doi:10.1109/MEMS61431.2025.10917441

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Self-Assembled Hierarchical Nanoporous Structures for Durable Lubricant-Infused Surfaces

Lim, Joowon;
Lee, Geonho;
Kim, Beomsu;
Lee, Sueng Yoon;
Lim, Dohyun;
... Oh, Junho;
... Lee, Won Chul

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초록

This work demonstrates a method for fabricating water-repelling lubricant infused surfaces (LISs) with enhanced durability of infused lubricant. Utilizing multi-tiered surface features composed of a primary nanoporous silicon nanopore array with a secondary layer of copper oxide nanostructures, the fabricated surface displays superior lubricant retention under water droplet shedding conditions compared to reference samples with larger surface patterns. Furthermore, passive recovery in drained regions was also observed, showcasing versatility of the surface's design. The fabrication methods and results presented offer pathways for developing simplified and effective nanoscale surfaces for applications in nanoscale research and fabrication. © 2025 IEEE.

키워드

AAO mask; copper oxide nanostructures; hierarchical surface; Lubricant-infused surface; Fabrication; Micromechanical devices; Self-assembly; Lubricants; Silicon; Nanoscale devices; Nanostructures; Copper

제목: Self-Assembled Hierarchical Nanoporous Structures for Durable Lubricant-Infused Surfaces

저자: Lim, Joowon; Lee, Geonho; Kim, Beomsu; Lee, Sueng Yoon; Lim, Dohyun; Oh, Junho; Lee, Won Chul

DOI: 10.1109/MEMS61431.2025.10917441

발행일: 2025-03

유형: Proceedings Paper

저널명: 2025 IEEE 38TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS

페이지: 111 ~ 113