ScholarWorks@Hanyang University ERICA Campus

상세 보기

Plasma Atomic Layer Etching of Dielectric Films Using β-Diketonate Reagents

제목
Plasma Atomic Layer Etching of Dielectric Films Using β-Diketonate Reagents
저자
김우희
발행일
2022-11-14
학회명
KISM 2022
개최지
부산파라다이스호텔

ScholarWorks@Hanyang University ERICA Campus

(15588) 경기도 안산시 상록구 한양대학로 55 Tel. +82-31-400-4269

COPYRIGHT © Hanyang University ERICA Campus All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.