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Crystallinity-Preserving Atomic Layer Etching and Post Treatment Engineering of Ferroelectric Hf1-xZrxO2 Thin Films
- 제목
- Crystallinity-Preserving Atomic Layer Etching and Post Treatment Engineering of Ferroelectric Hf1-xZrxO2 Thin Films
- 저자
- 안지훈
- 발행일
- 2025-11-25
- 학회명
- 8th International Conference on Advanced Electromaterials