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Effect of Scrubbing Parameters on Mechanical Properties and Wafer Cleaning during Post-CMP PVA Brush Cleaning
- 제목
- Effect of Scrubbing Parameters on Mechanical Properties and Wafer Cleaning during Post-CMP PVA Brush Cleaning
- 저자
- 박진구
- 발행일
- 2022-11-14
- 학회명
- KISM, 2022
- 개최지
- 부산