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Effect of slurry additives on Co-BTA complex stability and inhibition property during Co CMP process
- 제목
- Effect of slurry additives on Co-BTA complex stability and inhibition property during Co CMP process
- 저자
- 박진구
- 발행일
- 2021-06-08
- 학회명
- The Surface Preparation and Cleaning Conference 2021 (SPCC 2021)
- 개최지
- 온라인