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Investigation of the Cross-Contamination Mechanism by PVA Brush Scrubbing Process and Parameters during Post-CMP Cleaning
- 제목
- Investigation of the Cross-Contamination Mechanism by PVA Brush Scrubbing Process and Parameters during Post-CMP Cleaning
- 저자
- 김태곤
- 발행일
- 2024-10-18
- 학회명
- The 19th International Conference on Planarization/CMP Technology 2024
- 개최지
- Kurhaus Wiesbaden Germany