상세 보기
Atomic Layer Deposition of Ru Using a New Zero-Valent Ru Precursor Containing an Open Ligand
- 제목
- Atomic Layer Deposition of Ru Using a New Zero-Valent Ru Precursor Containing an Open Ligand
- 저자
- 안지훈
- 발행일
- 2025-11-26
- 학회명
- 8th International Conference on Advanced Electromaterials