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Improved Ferroelectricity of Hf0.4Zr0.6O2 Thin Films in Low Thermal Budget by Using a Novel Precursor
- 제목
- Improved Ferroelectricity of Hf0.4Zr0.6O2 Thin Films in Low Thermal Budget by Using a Novel Precursor
- 저자
- 안지훈
- 발행일
- 2024-05-22
- 학회명
- 한국반도체디스플레이기술학회 2024