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Atomic Layer Deposition of Metal Thin Film using discrete feeding method (DFM) and electric field/potential assisted atomic layer deposition (EA-ALD
- 제목
- Atomic Layer Deposition of Metal Thin Film using discrete feeding method (DFM) and electric field/potential assisted atomic layer deposition (EA-ALD
- 저자
- 박태주
- 발행일
- 2020-06-29
- 학회명
- ALD/ALE 2020
- 개최지
- Virtual meeting