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Formulation and Evaluation of Diluted Sulfuric-Peroxide-HF (DSP+) Mixtures for Cleaning High-Aspect Ratio Contacts in 3D NAND
- 제목
- Formulation and Evaluation of Diluted Sulfuric-Peroxide-HF (DSP+) Mixtures for Cleaning High-Aspect Ratio Contacts in 3D NAND
- 저자
- 박진구
- 발행일
- 2021-04-14
- 학회명
- The Symposium on Ultra Clean Processing of Semiconductor Surfaces 2018 (UCPSS 2021)
- 개최지
- 온라인