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The Effect of Process Pressure on Improving Resistivity of Ru Thin Films Deposited by Atomic Layer Deposition
- 제목
- The Effect of Process Pressure on Improving Resistivity of Ru Thin Films Deposited by Atomic Layer Deposition
- 저자
- 안지훈
- 발행일
- 2024-01-25
- 학회명
- The 31th Korean Conference in Semiconductors