Nanolithography for basic science research

초록

I will review the recent progress of nanolithography technology employed in basic science research field. In semiconductor physics area, especially low dimensional quantum transport, lithography became an invaluable tool for the creation of novel physical systems that have not existed in nature. New physical phenomena could be observed through these systems. Spin phenomenon was one of important subject among these new physics, especially related to the quantum information physics. This kind of a trend combining technological approach and pure sicentific subjects are leading a new scheme in basic science research.