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A Novel Method to Evaluate the Contact Area of PVA Brushes during Post-CMP Cleaning
- 제목
- A Novel Method to Evaluate the Contact Area of PVA Brushes during Post-CMP Cleaning
- 저자
- 김태곤
- 발행일
- 2023-11-20
- 학회명
- Korean International Semiconductor Conference on Manufacturing Technology 2023
- 개최지
- Busan, Korea