상세 보기
Investigation of the Formation OF WOx DURING Tungsten (W) CHEMICAL MECHANICAL PLANARIZATION (CMP)
- 제목
- Investigation of the Formation OF WOx DURING Tungsten (W) CHEMICAL MECHANICAL PLANARIZATION (CMP)
- 저자
- 박진구
- 발행일
- 2019-09-16
- 학회명
- 2019 International Conference on Planarization/CMP Technology
- 개최지
- Ambassador Hotel, Hsinchu, Taiwan