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Investigation of Selective Wet Etching of SiGe Substrates for High-Performance Device Manufacturing
- 제목
- Investigation of Selective Wet Etching of SiGe Substrates for High-Performance Device Manufacturing
- 저자
- 김태곤
- 발행일
- 2023-09-12
- 학회명
- SYMPOSIUM ON ULTRA CLEAN PROCESSING OF SEMICONDUCTOR SURFACES 2023
- 개최지
- Brugge, Belgium