A single-electrode capacitive sensor using incremental delta-sigma architecture

초록

This paper presents a single-electrode capacitive sensor using a single-bit second-order incremental delta-sigma architecture. In order to achieve high accuracy in this capacitance-to-digital converter (CDC), the shielding signal and the digitally controlled offset capacitors are used in combination with the delta-sigma CDC. The designed sensor is suitable for capacitive transducers for +/- 10 pF input range with sub-fF resolution.

키워드