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Effect of H2/N2 Ratio on Molybdenum Nitride Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
- 제목
- Effect of H2/N2 Ratio on Molybdenum Nitride Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
- 저자
- 안지훈
- 발행일
- 2025-06-03
- 학회명
- The 28th edition of the IEEE International Interconnect Technology Conference (IEEE IITC)