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Li, N co-controlled Lithium Phosphorous Oxy-nitride(LiPON) Coating for Three Dimensional Thin Film Solid-state Batteries (3D TSSBs) using ALD
- 제목
- Li, N co-controlled Lithium Phosphorous Oxy-nitride(LiPON) Coating for Three Dimensional Thin Film Solid-state Batteries (3D TSSBs) using ALD
- 저자
- 박태주
- 발행일
- 2021-06-28
- 학회명
- ALD/ALE 2021
- 개최지
- 온라인