ScholarWorks@Hanyang University ERICA Campus

상세 보기

A Strategy to Facilely Deposit the Multi-layer HfO2/ZrO2 Thin Films with Ferroelectric Properties by Atomic Layer Deposition

제목
A Strategy to Facilely Deposit the Multi-layer HfO2/ZrO2 Thin Films with Ferroelectric Properties by Atomic Layer Deposition
저자
안지훈
발행일
2023-10-31
학회명
7th International Conference on Advanced Electromaterials

ScholarWorks@Hanyang University ERICA Campus

(15588) 경기도 안산시 상록구 한양대학로 55 Tel. +82-31-400-4269

COPYRIGHT © Hanyang University ERICA Campus All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.