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PECVD SiCO Thin films Deposition: Compositional Control using Hollow Cathode Plasma

제목
PECVD SiCO Thin films Deposition: Compositional Control using Hollow Cathode Plasma
저자
박태주
발행일
2026-01-30
학회명
제33회 한국반도체학술대회
개최지
강원도 하이원리조트

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