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Effect of sputtering working pressure on the reliability and performance of amorphous indium gallium zinc oxide thin film transistors
- Lee, Taeho;
- Park, Jin-Seok;
- Oh, Saeroonter
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10초록
This work was supported by the National Research Foundation of Korea (NRF) funded by the Ministry of Science and ICT (MSIT) of the Korean government (Grant Nos. 2021R1F1A1060444and 2022M3F3A2A01073562).
키워드
BIAS-ILLUMINATION-STRESS; IMPROVEMENT; STABILITY
- 제목
- Effect of sputtering working pressure on the reliability and performance of amorphous indium gallium zinc oxide thin film transistors
- 저자
- Lee, Taeho; Park, Jin-Seok; Oh, Saeroonter
- 발행일
- 2024-03
- 유형
- Article
- 저널명
- AIP Advances
- 권
- 14
- 호
- 3
- 페이지
- 1 ~ 7