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Investigating the Role of Benzotriazole on Silica and Copper Ions Loading to Polyvinyl Acetal (PVA) Brush during Copper Post-CMP Cleaning
- 제목
- Investigating the Role of Benzotriazole on Silica and Copper Ions Loading to Polyvinyl Acetal (PVA) Brush during Copper Post-CMP Cleaning
- 저자
- 박진구
- 발행일
- 2024-11-13
- 학회명
- KISM 2024
- 개최지
- 부산