300-mm waferscale demonstration of III-V/Si V-groove depletion-type optical phase shifters on an industrial Si photonics platform

제목
300-mm waferscale demonstration of III-V/Si V-groove depletion-type optical phase shifters on an industrial Si photonics platform
저자
김영현
발행일
2022-07-08
학회명
2022 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD)
개최지
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