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Area-Selective Atomic Layer Deposition of High-Quality Ru Thin Films by Chemo-Selective Adsorption of Short Alkylating Agents,
- 제목
- Area-Selective Atomic Layer Deposition of High-Quality Ru Thin Films by Chemo-Selective Adsorption of Short Alkylating Agents,
- 저자
- 김우희
- 발행일
- 2022-11-10
- 학회명
- 2022 한국표면공학회 추계학술대회
- 개최지
- 광주 국립아시아문화전당