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Improved DRAM eletrode/dielectric interface properties using Nb2O5 and Ta2O5 ultrathin layer

제목
Improved DRAM eletrode/dielectric interface properties using Nb2O5 and Ta2O5 ultrathin layer
저자
김우희
발행일
2024-01-25
학회명
제 31회 한국반도체학술대회

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