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Improved PEALD ZrO2 film properties using hollow cathode plasma source

제목
Improved PEALD ZrO2 film properties using hollow cathode plasma source
저자
박태주
발행일
2021-12-02
학회명
한국표면공학회 추계학술대회
개최지
홍천 소노벨 비발디파크(Hybrid)

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