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Three-Dimensional Multi-Stacked Field-Effect Transistor Using Two-Dimensional Electron Gas at the Interface of Al2O3/ZnO Ultra-Thin Film Heterostructures
- 제목
- Three-Dimensional Multi-Stacked Field-Effect Transistor Using Two-Dimensional Electron Gas at the Interface of Al2O3/ZnO Ultra-Thin Film Heterostructures
- 저자
- 박태주
- 발행일
- 2021-06-28
- 학회명
- ALD/ALE 2021
- 개최지
- 온라인