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Formation of conformal Pd nanofilm using electrochemical atomic layer deposition (E-ALD) with ion concentration control and analyzing effect of ion concentration
- 제목
- Formation of conformal Pd nanofilm using electrochemical atomic layer deposition (E-ALD) with ion concentration control and analyzing effect of ion concentration
- 저자
- 유봉영
- 발행일
- 2021-10-28
- 학회명
- ISIMP
- 개최지
- Jeju, Korea