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Capacitive Humidity sensing characteristics of porous silicon oxide via electrodeposition assisted stripping and metal assisted chemical etching process
- 제목
- Capacitive Humidity sensing characteristics of porous silicon oxide via electrodeposition assisted stripping and metal assisted chemical etching process
- 저자
- 유봉영
- 발행일
- 2019-10-16
- 학회명
- 2019 ECS fall
- 개최지
- Atlanta, GA, USA