Thermal compression of copper-to-copper direct bonding by copper films electrodeposited at low temperature and high current density

제목
Thermal compression of copper-to-copper direct bonding by copper films electrodeposited at low temperature and high current density
저자
유봉영
발행일
2018-06-15
학회명
표면공학회 춘계학술대회
개최지
대한민국, 한양대학교 Erica