상세 보기
The effect of self-annealing property on copper-to-copper bonding
- 제목
- The effect of self-annealing property on copper-to-copper bonding
- 저자
- 유봉영
- 발행일
- 2022-11-16
- 학회명
- KISM, KOREAN INTERNATIONAL SEMICONDUCTOR CONFERENCE ON MANUFACTURING TECHNOLOGY 2022
- 개최지
- 한국