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자료 필터
자료유형
발행연도
2005 ~ 2026
2005 2026
키워드
언어
전체 227건 중 31번부터 40번까지의 결과를 표시합니다.
2024
Article
Underlayer dependent local wafer deformation during EUV exposure
- Ko, Hee-Chang ;
- Kang, Ji-Won ;
- Jeon, Ji-Hyun ;
- Son, Seung-Woo ;
- Oh, Hye-Keun
- 2024-10
- INTERNATIONAL CONFERENCE ON EXTREME ULTRAVIOLET LITHOGRAPHY 2024
- SPIE-INT SOC OPTICAL ENGINEERING
Article
Relative lifetime estimation of EUV pellicle by normalized thermal stress
- Jeon, Ji-Hyun ;
- Son, Seung-Woo ;
- Oh, Hye-Keun
- 2024-10
- INTERNATIONAL CONFERENCE ON EXTREME ULTRAVIOLET LITHOGRAPHY 2024
- SPIE-INT SOC OPTICAL ENGINEERING
Article
Source optimization for the whole arc slit with minimum optical proximity correction applied to contact hole patterns
- Yu, Da-Kyung ;
- Kim, Min-Woo ;
- Kim, Gug-Yong ;
- Chae, Yu-Jin ;
- Son, Seung-Woo ;
- 외 2명
- 2024-10
- INTERNATIONAL CONFERENCE ON EXTREME ULTRAVIOLET LITHOGRAPHY 2024
- SPIE-INT SOC OPTICAL ENGINEERING
Article
Improving demand forecasting in open systems with cartogram-enhanced deep learning
- Park, Sangjoon ;
- Kwon, Yongsung ;
- Soh, Hyungjoon ;
- Lee, Mi Jin ;
- Son, Seung-Woo
- 2024-07
- Chaos, Solitons & Fractals
- PERGAMON-ELSEVIER SCIENCE LTD
Conference
Spatial distribution of hospitals minimizing the age-dependent fatalities of tuberculosis
- 2024-06-19
Conference
Analyzing the relationship between regional mobility variations and COVID-19 confirmed cases
- 2024-06-19