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자료 필터
자료유형
발행연도
2005 ~ 2026
2005 2026
키워드
언어
전체 227건 중 21번부터 30번까지의 결과를 표시합니다.
2025
Article
Source optimization for DRAM critical layer with minimum optical proximity correction
- Son, Seung-Woo ;
- Kim, Min-Woo ;
- Yu, Da-Kyung ;
- Chae, Yu-Jin ;
- Ko, Hee-Chang ;
- 외 3명
- 2025-04
- OPTICAL AND EUV NANOLITHOGRAPHY XXXVIII
- SPIE-INT SOC OPTICAL ENGINEERING
Article
Sublayer dependent thermal deformation during EUV exposure
- Son, Seung-Woo ;
- Ko, Hee-Chang ;
- Kang, Ji-Won ;
- Kim, Min-Woo ;
- Chae, Yu-Jin ;
- 외 1명
- 2025-04
- OPTICAL AND EUV NANOLITHOGRAPHY XXXVIII
- SPIE-INT SOC OPTICAL ENGINEERING
Article
Thermomechanical stability analysis of large masks (6" × 12") for high-NA EUV lithography
- Son, Seung-Woo ;
- Kang, Ji-Won ;
- Ko, Hee-Chang ;
- Jeon, Ji-Hyun ;
- Kim, Min-Woo ;
- 외 3명
- 2025-04
- OPTICAL AND EUV NANOLITHOGRAPHY XXXVIII
- SPIE-INT SOC OPTICAL ENGINEERING
Article
Pixelated source polarization optimization for high-NA EUV lithography
- Son, Seung-Woo ;
- Chae, Yu-Jin ;
- Kim, Min-Woo ;
- Yu, Da-Kyung ;
- Kang, Ji-Won ;
- 외 3명
- 2025-04
- OPTICAL AND EUV NANOLITHOGRAPHY XXXVIII
- SPIE-INT SOC OPTICAL ENGINEERING
Article
Quantifying traffic patterns with percolation theory: a case study of Seoul roads
- Kwon, Yongsung ;
- Lee, Mi Jin ;
- Son, Seung-Woo
- 2025-03
- Journal of the Korean Physical Society
- KOREAN PHYSICAL SOC
2024
Article
Through pitch line width difference minimization by pixel source optimization
- Kim, M.-W. ;
- Yu, D.-K. ;
- Chae, Y.-J. ;
- Ko, H.-C. ;
- Kang, J.-W. ;
- ... Son, S.-W. ;
- 외 2명
- 2024-11
- PHOTOMASK TECHNOLOGY 2024
- SPIE-INT SOC OPTICAL ENGINEERING
Conference
Exploring Chimera States in Synchronous Oscillators: Focusing Solely on Triadic
- 2024-10-23