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자료 필터
자료유형
발행연도
2014 ~ 2026
2014 2026
키워드
언어
전체 204건 중 1번부터 10번까지의 결과를 표시합니다.
2026
Article
Recovering dielectric integrity in atomic layer etched ZrO2 MIM capacitors via post-etch annealing
- Lee, Jeongbin ;
- Oh, Jiwoo ;
- Kwon, Yongju ;
- Kim, Jung-Tae ;
- Kim, Ji Hwan ;
- ... Park, Tae Joo ;
- ... Ahn, Ji-Hoon ;
- ... Kim, Woo-Hee ;
- 외 1명
- 2026-10
- Applied Surface Science
- ELSEVIER
Article
Thickness-dependent shift of the ferroelectric composition window in ultrathin Hf1-xZrxO2 thin films
- Kim, Gunho ;
- Kim, Hyo-Bae ;
- Cho, Hye-Won ;
- Lee, Hyungseok ;
- Kho, Wonwoo ;
- ... Ahn, Ji-Hoon ;
- 외 1명
- 2026-09
- Applied Surface Science
- ELSEVIER
Article
Composition-controlled hafnium-based inorganic/organic hybrid dry photoresist via discrete feeding-molecular layer deposition
- Ha, Kyungryul ;
- Kim, Dong Geun ;
- Kim, Hyekyung ;
- Ahn, Ji-Hoon ;
- Kim, Woo-Hee ;
- ... Park, Tae Joo
- 2026-07
- Applied Surface Science
- ELSEVIER
Article
Deposition-Driven Phase Evolution in Hf1-x ZrxO2 Enabled by a Thermally Stabilized Cyclopentadienyl Precursor System
- Cho, Hye-Won ;
- Kim, Hyo-Bae ;
- Kim, Gunho ;
- Lee, Hyungseok ;
- Kim, Jin Sik ;
- ... Ahn, Ji-Hoon ;
- 외 2명
- 2026-06
- Chemistry of Materials
- AMER CHEMICAL SOC
Article
Engineering switching dynamics and polarization in Hf1-xZrxO2 ferroelectric thin films via vertical compositional asymmetry
- Kim, Ji Woo ;
- Kim, Hyo-Bae ;
- Kim, Gunho ;
- Lee, Hyungseok ;
- Yoon, Chang Mo ;
- ... Kim, Woo-Hee ;
- ... Park, Tae Joo ;
- ... Ahn, Ji-Hoon
- 2026-06
- Journal of Alloys and Compounds
- ELSEVIER SCIENCE SA
Conference
Crystallization and Electrical Performance Enhancement of Indium Oxide Thin-Film Transistors via Niobium Doping
- 2026-05-29
Article
Atomic layer deposition of MoO2 using a tetravalent precursor for template-driven rutile TiO2 growth in DRAM capacitors
- Shin, Yoonchul ;
- Jeon, Yeon-Ji ;
- Kim, Ji Hwan ;
- Hong, Chan-Bin ;
- Yoon, Chang Mo ;
- ... Ahn, Ji-Hoon ;
- 외 2명
- 2026-05
- Applied Surface Science
- ELSEVIER
Conference
Improved Electrical Characteristics of Indium Oxide Thin Film Transistors by Niobium Ion-Induced Crystallization
- 2026-04-26
Conference
Atomic layer deposition of MoCx as a next-generation electrode using a liquid precursor
- 2026-04-26
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