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자료 필터
자료유형
발행연도
2021 ~ 2026
2021 2026
키워드
언어
전체 4건 중 1번부터 4번까지의 결과를 표시합니다.
2026
Article
Molecular-level insight into amino acid additive effects on ceria-film interactions and STI-CMP selectivity
- Nguyen, Van-Tuan ;
- Yu, Nathaniel ;
- Kim, Patrick Joohyun ;
- Seo, Jihoon
- 2026-10
- Applied Surface Science
- ELSEVIER
Article
Mechanistic study of ceria particle redeposition during post-CMP PVA brush cleaning for defect reduction in advanced semiconductor manufacturing
- Nguyen, Van-Tuan ;
- Nishi, Tomoya ;
- Yamamoto, Shinnosuke ;
- Hiyama, Hirokuni ;
- Seo, Jihoon
- 2026-09
- Journal of Manufacturing Processes
- Elsevier BV
Article
Molybdenum Ion-Induced Adhesion of Colloidal Silica to Polyvinyl Acetal Brushes in Post-Chemical Mechanical Planarization Applications: Experiments and Multiscale Simulations
- Kumar, Sumit ;
- Jalalzai, Palwasha ;
- Kim, Tae-Gon ;
- Seo, Jihoon ;
- Lee, Junsang ;
- ... Kim, Byung-Hyun ;
- ... Park, Jin-Goo ;
- 외 3명
- 2026-05
- ACS Applied Materials & Interfaces
- AMER CHEMICAL SOC
2021
Article
3D trajectories and diffusion of single ceria particles near a glass surface and their removal
- 2021-01
- Journal of Materials Research
- Materials Research Society