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자료 필터
자료유형
발행연도
2021 ~ 2027
2021 2027
키워드
언어
전체 7건 중 1번부터 7번까지의 결과를 표시합니다.
2027
Article
In-situ electrochemical probing of passivation and repassivation at copper–azole interfaces during chemical mechanical planarization
- Ryu, Seokgyu ;
- Ramu, Murali ;
- Lee, Myunggoo ;
- Kim, Seulki ;
- Yoo, Kyungmin ;
- ... Seo, Jihoon ;
- 외 2명
- 2027-02
- Applied Surface Science
- Elsevier B.V.
Article
Role of acidic and alkaline cleaning solutions on ceria removal and brush-mediated cross-contamination during post-STI CMP cleaning
- Kumar, Sumit ;
- Lee, Jae-Hyeong ;
- Gye, Yeon Je ;
- Kim, Tae-Gon ;
- Seo, Jihoon ;
- ... Park, Jin-Goo
- 2027-02
- Materials Science in Semiconductor Processing
- Elsevier Ltd
Article
Chemistry of selective metal ions adsorption and loading onto PVAc polymer brush during advanced metal post-CMP cleaning
- Yadav, Maheepal ;
- Bisht, Sanjay ;
- Kim, Byung-Hyun ;
- Park, Se-Hoon ;
- Kim, Tae-Gon ;
- ... Seo, Jihoon ;
- ... Park, Jin-Goo
- 2027-01
- Applied Surface Science
- Elsevier B.V.
2026
Article
Molecular-level insight into amino acid additive effects on ceria-film interactions and STI-CMP selectivity
- Nguyen, Van-Tuan ;
- Yu, Nathaniel ;
- Kim, Patrick Joohyun ;
- Seo, Jihoon
- 2026-10
- Applied Surface Science
- ELSEVIER
Article
Mechanistic study of ceria particle redeposition during post-CMP PVA brush cleaning for defect reduction in advanced semiconductor manufacturing
- Nguyen, Van-Tuan ;
- Nishi, Tomoya ;
- Yamamoto, Shinnosuke ;
- Hiyama, Hirokuni ;
- Seo, Jihoon
- 2026-09
- Journal of Manufacturing Processes
- Elsevier BV
Article
Molybdenum Ion-Induced Adhesion of Colloidal Silica to Polyvinyl Acetal Brushes in Post-Chemical Mechanical Planarization Applications: Experiments and Multiscale Simulations
- Kumar, Sumit ;
- Jalalzai, Palwasha ;
- Kim, Tae-Gon ;
- Seo, Jihoon ;
- Lee, Junsang ;
- ... Kim, Byung-Hyun ;
- ... Park, Jin-Goo ;
- 외 3명
- 2026-05
- ACS Applied Materials & Interfaces
- AMER CHEMICAL SOC
2021
Article
3D trajectories and diffusion of single ceria particles near a glass surface and their removal
- Seo, Jihoon ;
- Gowda, Akshay ;
- Khajornrungruang, Panart ;
- Hamada, Satomi ;
- Babu, S. V.
- 2021-02
- Journal of Materials Research
- Materials Research Society