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자료 필터
자료유형
발행연도
2005 ~ 2026
2005 2026
키워드
언어
전체 227건 중 11번부터 20번까지의 결과를 표시합니다.
2025
Article
Overlay deviation caused by mask heating during EUV exposure
- Kang, Ji-won ;
- Ko, Heechang ;
- Kim, Minwoo ;
- Chae, Yu-jin ;
- Oh, Hyekeun ;
- ... Son, Seung-woo
- 2025-11
- PHOTOMASK TECHNOLOGY 2025
- SPIE-INT SOC OPTICAL ENGINEERING
Article
Source optimization for less aggressive optical proximity correction in 0.55 NA logic single patterning
- Kim, Minwoo ;
- Chae, Yu-jin ;
- Ko, Heechang ;
- Kang, Ji-won ;
- Yeung, Michael S. ;
- ... Son, Seung-woo ;
- 외 1명
- 2025-11
- PHOTOMASK TECHNOLOGY 2025
- SPIE-INT SOC OPTICAL ENGINEERING
Article
Image twist and placement error during EUV exposure
- Ko, Heechang ;
- Kang, Ji-won ;
- Kim, Minwoo ;
- Chea, Yu-jin ;
- Oh, Hyekeun ;
- ... Son, Seung-woo
- 2025-11
- Proceedings of SPIE - The International Society for Optical Engineering
- SPIE
Article
Pixelated source polarization optimization for hyper-NA EUV lithography
- Chae, Yu-jin ;
- Kim, Minwoo ;
- Kang, Ji-won ;
- Ko, Heechang ;
- Son, Seung-woo ;
- 외 2명
- 2025-11
- Proceedings of SPIE - The International Society for Optical Engineering
- SPIE
Conference
Winning strategies emerge from the dynamics of pitching patterns in Major League Baseball
- 2025-10-23
Article
A computational analysis of traffic cluster dynamics using a percolation-based approach in urban road networks
- Seung-Woo Son ;
- Yongsung Kwon ;
- Minjin Lee ;
- Mi Jin Lee
- 2025-07
- Journal of Computational Science
- ELSEVIER
Conference
Analyzing the Distribution of R&D Performance in Bottom-Up and Top-Down Research Planning: A Statistical Physics Approach
- 2025-04-24