상세 보기
박태주
Park, Tae Joo
ERICA 첨단융합대학
ERICA 신소재·반도체공학전공
연구분야
- Semiconductor device/material,
- 반도체 소자/소재
자료 필터
자료유형
발행연도
2008 ~ 2026
2008 2026
키워드
언어
전체 464건 중 1번부터 10번까지의 결과를 표시합니다.
2026
Article
Recovering dielectric integrity in atomic layer etched ZrO2 MIM capacitors via post-etch annealing
- Lee, Jeongbin ;
- Oh, Jiwoo ;
- Kwon, Yongju ;
- Kim, Jung-Tae ;
- Kim, Ji Hwan ;
- ... Park, Tae Joo ;
- ... Ahn, Ji-Hoon ;
- ... Kim, Woo-Hee ;
- 외 1명
- 2026-10
- Applied Surface Science
- ELSEVIER
Article
Composition-controlled hafnium-based inorganic/organic hybrid dry photoresist via discrete feeding-molecular layer deposition
- Ha, Kyungryul ;
- Kim, Dong Geun ;
- Kim, Hyekyung ;
- Ahn, Ji-Hoon ;
- Kim, Woo-Hee ;
- ... Park, Tae Joo
- 2026-07
- Applied Surface Science
- ELSEVIER
Article
Engineering switching dynamics and polarization in Hf1-xZrxO2 ferroelectric thin films via vertical compositional asymmetry
- Kim, Ji Woo ;
- Kim, Hyo-Bae ;
- Kim, Gunho ;
- Lee, Hyungseok ;
- Yoon, Chang Mo ;
- ... Kim, Woo-Hee ;
- ... Park, Tae Joo ;
- ... Ahn, Ji-Hoon
- 2026-06
- Journal of Alloys and Compounds
- ELSEVIER SCIENCE SA
Article
Impurity-controlled Ru thin films via hollow cathode plasma-enhanced atomic layer deposition with low resistivity and high conformality
- Lee, Seung-Hun ;
- Jo, In-Ho ;
- Han, Ji Won ;
- Ha, Jihun ;
- Park, Ahyun ;
- ... Park, Tae Joo ;
- 외 4명
- 2026-05
- Journal of Materials Research and Technology
- ELSEVIER
Article
Minimum effective thickness of cathode protective layers for sulfide-based all-solid-state batteries via powder-atomic layer deposition
- Kwon, Kyu Moon ;
- Lee, Minji ;
- Kim, Dae Ho ;
- Kang, Hyo Rang ;
- Park, Tae Joo
- 2026-03
- Energy Storage Materials
- ELSEVIER
Conference
Advanced Atomic Layer deposition: Titanium Nitride Thin Films growth using Discrete Feeding Method with Brute Hydrazine
- 2026-01-30
Conference
PECVD SiCO Thin films Deposition: Compositional Control using Hollow Cathode Plasma
- 2026-01-30
1