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박진구
Park, Jin Goo
ERICA 첨단융합대학
ERICA 신소재·반도체공학전공
연구분야
- (Bio-)MEMS,
- 반도체/전자재료 세정,
- 연마
자료 필터
자료유형
발행연도
1992 ~ 2027
1992 2027
키워드
언어
전체 949건 중 241번부터 250번까지의 결과를 표시합니다.
2016
Conference
Effect of Additives and Diaphragm Pump on Particle Agglomerations in Slurry Distribution System
- 2016-10-18
Conference
Effect of Corrosion Inhibitors on Particle Contamination and Removal for Cu CMP Application
- 2016-10-17
Article
Investigation of cu-BTA complex formation during Cu chemical mechanical planarization process
- Cho, Byoung-Jun ;
- Shima, Shohei ;
- Hamada, Satomi ;
- Park, Jin-Goo
- 2016-10
- Applied Surface Science
- ELSEVIER
Article
Fabrication of hydrophobic/hydrophilic switchable aluminum surface using poly(N-isopropylacrylamide)
- Ryu, Heon-Yul ;
- Yoon, Sung Ho ;
- Han, Dong-Ho ;
- Hafeez, Hassan ;
- Paluvai, Nagarjuna Reddy ;
- ... Park, Jin-Goo ;
- 외 1명
- 2016-10
- Progress in Organic Coatings
- ELSEVIER SCIENCE SA
Article
Influence of non-uniform intensity distribution of deformed pellicle for N7 patterning
- Kim, In seon ;
- Kim, Guk jin ;
- Yeung, Michael ;
- Barouch, Eytan ;
- Kim, Min su ;
- ... Park, Jin-Goo ;
- 외 1명
- 2016-09
- PHOTOMASK TECHNOLOGY 2016
- SPIE-INT SOC OPTICAL ENGINEERING
Article
Effect of pH and chemical mechanical planarization process conditions on the copper-benzotriazole complex formation
- Cho, Byoung-Jun ;
- Kim, Jin-Yong ;
- Hamada, Satomi ;
- Shima, Shohei ;
- Park, Jin-Goo
- 2016-06
- Japanese Journal of Applied Physics
- IOP PUBLISHING LTD