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박진구
Park, Jin Goo
ERICA 첨단융합대학
ERICA 신소재·반도체공학전공
연구분야
- (Bio-)MEMS,
- 반도체/전자재료 세정,
- 연마
자료 필터
자료유형
발행연도
1992 ~ 2027
1992 2027
키워드
언어
전체 948건 중 1번부터 10번까지의 결과를 표시합니다.
2027
Article
Chemistry of selective metal ions adsorption and loading onto PVAc polymer brush during advanced metal post-CMP cleaning
- Yadav, Maheepal ;
- Bisht, Sanjay ;
- Kim, Byung-Hyun ;
- Park, Se-Hoon ;
- Kim, Tae-Gon ;
- ... Seo, Jihoon ;
- ... Park, Jin-Goo
- 2027-01
- Applied Surface Science
- Elsevier B.V.
2026
Article
Role of brush properties and pH on Cu ion-induced silica loading to polyvinyl acetal brushes during post-CMP cleaning
- Bisht, Sanjay ;
- Yadav, Maheepal ;
- Park, Se-Hoon ;
- Hiyama, Hirokuni ;
- Kim, Tae-Gon ;
- ... Park, Jin-Goo
- 2026-10
- Applied Surface Science
- ELSEVIER
Article
Molybdenum Ion-Induced Adhesion of Colloidal Silica to Polyvinyl Acetal Brushes in Post-Chemical Mechanical Planarization Applications: Experiments and Multiscale Simulations
- Kumar, Sumit ;
- Jalalzai, Palwasha ;
- Kim, Tae-Gon ;
- Seo, Jihoon ;
- Lee, Junsang ;
- ... Kim, Byung-Hyun ;
- ... Park, Jin-Goo ;
- 외 3명
- 2026-05
- ACS Applied Materials & Interfaces
- AMER CHEMICAL SOC
Article
Polyethyleneimine polymer as an effective corrosion inhibitor for advanced node tungsten post-CMP cleaning
- Punathil Meethal, Ranjith ;
- Kumar, Sumit ;
- Yadav, Maheepal ;
- Jalalzai, Palwasha ;
- Klipp, Andreas ;
- ... Kim, Tae-Gon ;
- ... Park, Jin-Goo
- 2026-01
- Applied Surface Science
- ELSEVIER
2025
Article
Cobalt Ion Adsorption on Polyvinyl Acetal Brushes: Impact on Silica-Nanoparticle Loading During Metal Post-Chemical Mechanical Planarization Cleaning
- Yadav, Maheepal ;
- Bisht, Sanjay ;
- Kim, Byung-Hyun ;
- Hiyama, Hirokuni ;
- Kim, Tae-Gon ;
- ... Park, Jin-Goo
- 2025-12
- ACS Applied Nano Materials
- AMER CHEMICAL SOC
Conference
고품질 하이브리드 Cu 본딩 공정을 위한 Cu Dishing 조절 CMP Slurry 설계 및 Post-CMP Cleaning 원천 기술 개발
- 2025-11-12
Conference
고품질 하이브리드 Cu 본딩 공정을 위한 Cu Dishing 조절 CMP Slurry 설계 및 Post-CMP Cleaning 원천 기술 개발
- 2025-11-12
Conference
Effect of Corrosion Inhibitors and Oxidizers to Achieve Controlled Molybdenum Oxidation and Dissolution
- 2025-10-31